Advances in Rapid Thermal Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Advances in Rapid Thermal Processing write by Fred Roozeboom. This book was released on 1999. Advances in Rapid Thermal Processing available in PDF, EPUB and Kindle.
Advances in Rapid Thermal and Integrated Processing
Advances in Rapid Thermal and Integrated Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Advances in Rapid Thermal and Integrated Processing write by F. Roozeboom. This book was released on 2013-03-09. Advances in Rapid Thermal and Integrated Processing available in PDF, EPUB and Kindle. Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Rapid Thermal and Integrated Processing V: Volume 429
Rapid Thermal and Integrated Processing V: Volume 429 - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Rapid Thermal and Integrated Processing V: Volume 429 write by J. C. Gelpey. This book was released on 1996-10-14. Rapid Thermal and Integrated Processing V: Volume 429 available in PDF, EPUB and Kindle. This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.
Advances in Rapid Thermal and Integrated Processing
Advances in Rapid Thermal and Integrated Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Advances in Rapid Thermal and Integrated Processing write by F. Roozeboom. This book was released on 2014-01-15. Advances in Rapid Thermal and Integrated Processing available in PDF, EPUB and Kindle.
Rapid Thermal Processing
Rapid Thermal Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Rapid Thermal Processing write by Richard B. Fair. This book was released on 2012-12-02. Rapid Thermal Processing available in PDF, EPUB and Kindle. This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
