Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride write by Bert Jeffrey Lutzenberger. This book was released on 2006. Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride available in PDF, EPUB and Kindle. This research presents a novel fabrication method combining surface and bulk micromachining techniques to deposit mechanically stiffened silicon nitride films for use in MEMS fabrication. The stiffened silicon nitride film consists of a thin (~1.5 um) top sheet with stiffening fins molded to the back of the film. In the final configuration, the fins extend between 15 um and 40 um vertically from the back of the film. The molded fins are arranged into periodic square and hexagonal cell configurations ranging in size from 10 um to 250 um. The periodic cells significantly increase the bending stiffness of LPCVD silicon nitride films resulting in a film with a high strength-to-weight ratio. Larger aperture, silicon nitride micro mirrors are fabricated with the mechanically stiffened silicon nitride film. The mirrors demonstrate that deformation due to postrelease thermal strain and inertia during dynamic actuation can be mitigated by employing the proposed stiffening technique. Furthermore, the mirrors are fabricated with a minimal amount of processing making the proposed microfabrication technique an attractive solution for various MEMS applications Finally, homogenized material properties are obtained for the periodically stiffened silicon nitride film. The homogenized material properties are then used to simplify finite element models of biaxial and single axis torsion micro mirrors fabricated from the proposed film. The resulting finite element models are shown to be in excellent agreement with the experimental models. The presented numerical analysis method significantly simplifies model complexity while simultaneously reducing the computational cost associated with simulating MEMS built from a periodically stiffened thin film.
Dissertation Abstracts International
Dissertation Abstracts International - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Dissertation Abstracts International write by . This book was released on 2006. Dissertation Abstracts International available in PDF, EPUB and Kindle.
MEMS Mirrors
MEMS Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook MEMS Mirrors write by Huikai Xie. This book was released on 2018-05-04. MEMS Mirrors available in PDF, EPUB and Kindle. This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Micromachined Mirrors
Micromachined Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Micromachined Mirrors write by Robert Conant. This book was released on 2013-04-17. Micromachined Mirrors available in PDF, EPUB and Kindle. Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
MEMS Materials and Processes Handbook
MEMS Materials and Processes Handbook - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook MEMS Materials and Processes Handbook write by Reza Ghodssi. This book was released on 2011-03-18. MEMS Materials and Processes Handbook available in PDF, EPUB and Kindle. MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
