Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging write by Yanhui Bai. This book was released on 2010. Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging available in PDF, EPUB and Kindle. Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micronx1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2x2 and 4x4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.
Micromachined Mirrors
Micromachined Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Micromachined Mirrors write by Robert Conant. This book was released on 2013-04-17. Micromachined Mirrors available in PDF, EPUB and Kindle. Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
MEMS Micromirrors for Imaging Applications
MEMS Micromirrors for Imaging Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook MEMS Micromirrors for Imaging Applications write by Li Li. This book was released on 2013. MEMS Micromirrors for Imaging Applications available in PDF, EPUB and Kindle. Optical MEMS (microelectromechanical systems) are widely used in various applications. In this thesis, the design, simulation and characterisation of two optical MEMS devices for imaging applications, a varifocal micromirror and a 2D scanning micromirror, are introduced. Both devices have been fabricated using the commercial Silicon-on-Insulator multi-users MEMS processes (SOIMUMPs), in the 10 m thick Silicon-on-Insulator (SOI) wafer. Optical MEMS device with variable focal length is a critical component for imaging system miniaturisation. In this thesis, a thermally-actuated varifocal micromirror (VFM) with 1-mm-diameter aperture is introduced. The electrothermal actuation through Joule heating of the micromirror suspensions and the optothermal actuation using incident laser power absorption have been demonstrated as well as finite element method (FEM) simulation comparisons. Especially, the optical aberrations produced by this VFM have been statistically quantified to be negligible throughout the actuation range. A compact imaging system incorporating this VFM has been demonstrated with high quality imaging results. MEMS 2D scanners, or scanning micromirrors, are another type of optical MEMS which have been widely investigated for applications such as biomedical microscope imaging, projection, retinal display and optical switches for telecommunication network, etc. For large and fast scanning motions, the actuation scheme to scan a micromirror in two axes, the structural connections and arrangement are fundamental. The microscanner introduced utilises two types of actuators, electrothermal actuators and electrostatic comb-drives, to scan a 1.2-mm-diameter gold coated silicon micromirror in two orthogonal axes. With assistance of FEM software, CoventorWare, the structure optimisation of actuators and flexure connections are presented. The maximum optical scan angles in two axes by each type of actuator individually and by actuating the two at the same time have been characterised experimentally. By programming actuation signals, the microscanner has achieved a rectangular scan pattern with 7° 10° angular-scan-field at a line-scan rate of around 1656 Hz.
Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors
Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors write by Pinju Hsiang. This book was released on 1993. Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors available in PDF, EPUB and Kindle.
Design and Characterization of MEMS Micromirror Devices
Design and Characterization of MEMS Micromirror Devices - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design and Characterization of MEMS Micromirror Devices write by Julianna E. Lin. This book was released on 2001. Design and Characterization of MEMS Micromirror Devices available in PDF, EPUB and Kindle. "This thesis explores the design, implementation and characterization of MEMS micromirror devices for use in optical systems. Possible applications for these devices include areas such as adaptive optics, beam scanning, and optical switches. The devices were fabricated using a commercial MEMS foundry process, known as the Multi-User MEMS Processes (MUMPs) foundry service; the resulting prototypes were characterized using a phase-shifting Mirau interferometer, assembled specifically for this work. From these results, it was shown that the MUMPs process can be used to create satisfactory designs for rotational micromirrors with tilt angles in the range of 0--23 mrad and control voltages in the range of 0--30 V In addition, the behaviour of these mirrors were shown to fall within 5% of the predicted values calculated by the theoretical models for the devices." --
