Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics write by Bautista Fernández Rocha. This book was released on 2011. Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics available in PDF, EPUB and Kindle.
Design, Fabrication and Characterization of MEMS Deformable Mirrors for Ocular Adaptive Optics
Design, Fabrication and Characterization of MEMS Deformable Mirrors for Ocular Adaptive Optics - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication and Characterization of MEMS Deformable Mirrors for Ocular Adaptive Optics write by Hyunkyu Park. This book was released on 2009. Design, Fabrication and Characterization of MEMS Deformable Mirrors for Ocular Adaptive Optics available in PDF, EPUB and Kindle.
Foundry Microfabrication of Deformable Mirrors for Adaptive Optics
Foundry Microfabrication of Deformable Mirrors for Adaptive Optics - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Foundry Microfabrication of Deformable Mirrors for Adaptive Optics write by William D. Cowan. This book was released on 1998-04-01. Foundry Microfabrication of Deformable Mirrors for Adaptive Optics available in PDF, EPUB and Kindle. Microelectromechanical Systems (MEMS) is a rapidly emerging field of research in which batch fabrication processes are used to construct miniature devices. MEMS devices are particularly well suited to optical applications. Foundry microfabrication offers a substantial cost advantage for prototype system development. In this research, foundry MEMS processes are used to fabricate low-cost deformable mirror systems (MEM-DMs) for adaptive optics. The challenges and design trades associated with fabrication of continuous and segmented deformable mirrors in foundry processes are examined in detail. Micromirror surface figure is shown to be critically important. Beam steering and optical aberration correction experiments conclusively demonstrate the potential of low-cost MEM-DMs. The prototype MEM-DM systems are approximately 1/ 500th the cost of conventionally manufactured deformable mirrors. An innovative direct digital control scheme further reduces adaptive optic system cost by eliminating the digital to analog converter typically required for each controlled element. In addition to the MEM-DMs, other MEMS devices are shown. The thermally actuated piston micromirrors offer greater deflections for operation at longer optical wavelengths. Other MEMS devices examined include a series of tilting mirrors, pressure gauges, test structures, electrostatic scratch drive actuated rotors, and a new type of electrostatic cantilever motor with lateral motion output.
Micromachined Mirrors
Micromachined Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Micromachined Mirrors write by Robert Conant. This book was released on 2013-04-17. Micromachined Mirrors available in PDF, EPUB and Kindle. Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging
Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging write by Yanhui Bai. This book was released on 2010. Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging available in PDF, EPUB and Kindle. Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micronx1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2x2 and 4x4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.
