Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors write by Pinju Hsiang. This book was released on 1993. Design, Fabrication and Characterization of Torsional Micromachined Silicon Mirrors available in PDF, EPUB and Kindle.
Micromachined Mirrors
Micromachined Mirrors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Micromachined Mirrors write by Robert Conant. This book was released on 2013-04-17. Micromachined Mirrors available in PDF, EPUB and Kindle. Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics
Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics write by Bautista Fernández Rocha. This book was released on 2011. Design, Fabrication and Characterization of High-stroke High-aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors for Adaptive Optics available in PDF, EPUB and Kindle.
Mems/Nems
Mems/Nems - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Mems/Nems write by Cornelius T. Leondes. This book was released on 2007-10-08. Mems/Nems available in PDF, EPUB and Kindle. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride
Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride write by Bert Jeffrey Lutzenberger. This book was released on 2006. Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride available in PDF, EPUB and Kindle. This research presents a novel fabrication method combining surface and bulk micromachining techniques to deposit mechanically stiffened silicon nitride films for use in MEMS fabrication. The stiffened silicon nitride film consists of a thin (~1.5 um) top sheet with stiffening fins molded to the back of the film. In the final configuration, the fins extend between 15 um and 40 um vertically from the back of the film. The molded fins are arranged into periodic square and hexagonal cell configurations ranging in size from 10 um to 250 um. The periodic cells significantly increase the bending stiffness of LPCVD silicon nitride films resulting in a film with a high strength-to-weight ratio. Larger aperture, silicon nitride micro mirrors are fabricated with the mechanically stiffened silicon nitride film. The mirrors demonstrate that deformation due to postrelease thermal strain and inertia during dynamic actuation can be mitigated by employing the proposed stiffening technique. Furthermore, the mirrors are fabricated with a minimal amount of processing making the proposed microfabrication technique an attractive solution for various MEMS applications Finally, homogenized material properties are obtained for the periodically stiffened silicon nitride film. The homogenized material properties are then used to simplify finite element models of biaxial and single axis torsion micro mirrors fabricated from the proposed film. The resulting finite element models are shown to be in excellent agreement with the experimental models. The presented numerical analysis method significantly simplifies model complexity while simultaneously reducing the computational cost associated with simulating MEMS built from a periodically stiffened thin film.
