Development of a Discharge Pumped 13 Nm Laser for Metrology of Projection Lithography Optics at the Manufacture-Site - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Development of a Discharge Pumped 13 Nm Laser for Metrology of Projection Lithography Optics at the Manufacture-Site write by . This book was released on 2003. Development of a Discharge Pumped 13 Nm Laser for Metrology of Projection Lithography Optics at the Manufacture-Site available in PDF, EPUB and Kindle. A high power capillary discharge cadmium plasma source was developed to investigate the generation of 13.2 nm coherent radiation for metrology tasks in Extreme Ultraviolet Lithography. Excitation of a capillary channel filled with Cd vapor with a fast current pulse (190 kA, 15 ns risetime) resulted in the successful excitation of 13.2 nm radiation from the 4d ISO-4p 1P1 laser line of Nickel-like Cd (Cd XXI). Spectra of this capillary discharge plasma showed the emission from the 13.2nm laser line is the most intense in that spectral region. Detailed spectroscopic studies confirmed that the observed 13.2 nm line radiation corresponds to the Cd XXI laser line, and identified fifty-five Cd XXI lines in the 12.7-18.4 nm region which constitute a valuable diagnostics to optimize the gain in the 13.2 nm laser line using line intensity ratio techniques. The dynamics and symmetry of the capillary discharge Cd plasma column were also studied using an EUV pinhole camera . The pinhole images show that the plasma column presents a good degree of symmetry up to the time of maximum compression.
Electrical & Electronics Abstracts
Electrical & Electronics Abstracts - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Electrical & Electronics Abstracts write by . This book was released on 1997. Electrical & Electronics Abstracts available in PDF, EPUB and Kindle.
Coherent Sources of XUV Radiation
Coherent Sources of XUV Radiation - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Coherent Sources of XUV Radiation write by Pierre Jaeglé. This book was released on 2006. Coherent Sources of XUV Radiation available in PDF, EPUB and Kindle. Extreme ultraviolet radiation, also referred to as soft X-rays or XUV, offers very special optical properties. The X-UV refractive index of matter is such that normal reflection cannot take place on polished surfaces whereas beam transmission through one micrometer of almost all materials reduces to zero. Therefore, it has long been a difficult task to imagine and to implement devices designed for complex optics experiments in this wavelength range. Thanks to new sources of coherent radiation - XUV-lasers and High Order Harmonics - the use of XUV radiation, for interferometry, holography, diffractive optics, non-linear radiation-matter interaction, time-resolved study of fast and ultrafast phenomena and many other applications, including medical sciences, is ubiquitous.
Development of Optical Concentrator Systems for Directly Solar Pumped Laser Systems
Development of Optical Concentrator Systems for Directly Solar Pumped Laser Systems - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Development of Optical Concentrator Systems for Directly Solar Pumped Laser Systems write by Yasser Abdel-Fattah Abdel-Hadi. This book was released on 2005. Development of Optical Concentrator Systems for Directly Solar Pumped Laser Systems available in PDF, EPUB and Kindle.
Summaries of Papers Presented at the Conference on Lasers and Electro-optics
Summaries of Papers Presented at the Conference on Lasers and Electro-optics - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Summaries of Papers Presented at the Conference on Lasers and Electro-optics write by . This book was released on 2002. Summaries of Papers Presented at the Conference on Lasers and Electro-optics available in PDF, EPUB and Kindle.