Equipment and Process Modeling and Diagnostics in Semiconductor Manufacturing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Equipment and Process Modeling and Diagnostics in Semiconductor Manufacturing write by Jiangxin Wang. This book was released on 2001. Equipment and Process Modeling and Diagnostics in Semiconductor Manufacturing available in PDF, EPUB and Kindle.
Intelligent Modeling, Diagnosis and Control of Manufacturing Processes
Intelligent Modeling, Diagnosis and Control of Manufacturing Processes - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Intelligent Modeling, Diagnosis and Control of Manufacturing Processes write by Bei-Tseng Bill Chu. This book was released on 1992. Intelligent Modeling, Diagnosis and Control of Manufacturing Processes available in PDF, EPUB and Kindle. 1. Manufacturing diagnosis and control: a task-specific approach / W.F. Punch III, A.K. Goel and J. Sticklen -- 2. The theory and application of diagnostic and control expert system based on plant model / J. Suzuki and M. Iwamasa -- 3. Integrated problem solving for the diagnosis of interacting process malfunctions / J.K. McDowell and J.F. Davis -- 4. A neural network model for diagnostic problem solving / Y. Peng and J.A. Reggia -- 5. Process control system for VLSI fabrication / E. Sachs [und weitere] -- 6. Development and application of equipment-specific process models for semiconductor manufacturing / K.-K. Lin and C. Spanos -- 7. Continuous equipment diagnosis using evidence integration - an LPCVD application / N.H. Chang, and C. Spanos -- 8. Equipment/instrument diagnosis with continuous and discrete causal relationships / B.-T.B. Chu -- 9. Intelligent control of semiconductor manufacturing processes / S.-S. Chen -- 10. A machine learning approach to diagnosis and control with applications in semiconductor manufacturing / K.B. Irani [und weitere]
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing write by M. Meyyappan. This book was released on 1997. Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing available in PDF, EPUB and Kindle.
Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing write by M. Meyyappan. This book was released on 1995. Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing available in PDF, EPUB and Kindle.
Fundamentals of Semiconductor Manufacturing and Process Control
Fundamentals of Semiconductor Manufacturing and Process Control - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Fundamentals of Semiconductor Manufacturing and Process Control write by Gary S. May. This book was released on 2006-05-26. Fundamentals of Semiconductor Manufacturing and Process Control available in PDF, EPUB and Kindle. A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
