High Dielectric Constant Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook High Dielectric Constant Materials write by Howard Huff. This book was released on 2005. High Dielectric Constant Materials available in PDF, EPUB and Kindle. Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.
High Dielectric Constant Materials
High Dielectric Constant Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook High Dielectric Constant Materials write by Howard Huff. This book was released on 2010-10-21. High Dielectric Constant Materials available in PDF, EPUB and Kindle. Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology.
Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set
Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set write by Hari Singh Nalwa. This book was released on 1999-09-07. Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set available in PDF, EPUB and Kindle. Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.
Low and High Dielectric Constant Materials
Low and High Dielectric Constant Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Low and High Dielectric Constant Materials write by Mark J. Lododa. This book was released on 2000. Low and High Dielectric Constant Materials available in PDF, EPUB and Kindle. Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arranged in sections on low and high dielectric constant materials, covering topics such as ammonia plasma passivation effects on properties of post-CMP low-k HSQ, characterization of ashing effects on low-k dielectric films, and electron beam curing of thin film polymer dielectrics. Other subjects include characterization of high-k dielectrics using the non-contact surface charge profiler method, and processing effects and electrical evaluation of ZrO2 formed by RTP oxidation of Zr. Loboda is affiliated with Dow Corning Corporation. c. Book News Inc.
High Permittivity Gate Dielectric Materials
High Permittivity Gate Dielectric Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook High Permittivity Gate Dielectric Materials write by Samares Kar. This book was released on 2013-06-25. High Permittivity Gate Dielectric Materials available in PDF, EPUB and Kindle. "The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects." .
