Incorporation of Metal Silicides and Refractory Metals in VLSI Technology - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Incorporation of Metal Silicides and Refractory Metals in VLSI Technology write by C. M. Osburn. This book was released on 1991. Incorporation of Metal Silicides and Refractory Metals in VLSI Technology available in PDF, EPUB and Kindle.
A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications
A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications write by Phu Hiep Luong. This book was released on 1984. A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications available in PDF, EPUB and Kindle.
Silicides for VLSI Applications
Silicides for VLSI Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Silicides for VLSI Applications write by Shyam P. Murarka. This book was released on 2012-12-02. Silicides for VLSI Applications available in PDF, EPUB and Kindle. Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Refractory Metals and Silicides for Very Large Scale Integration Applications
Refractory Metals and Silicides for Very Large Scale Integration Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Refractory Metals and Silicides for Very Large Scale Integration Applications write by Krishna C. Saraswat. This book was released on 1985. Refractory Metals and Silicides for Very Large Scale Integration Applications available in PDF, EPUB and Kindle. Continuous advancements in technology have resulted in integrated circuits with smaller device dimensions, and larger area and complexity. The overall circuit performance has depended primarily on the device properties. However, the parasitic resistance and capacitance associated with interconnections and contacts, as for an MOS transistor, are now beginning to influence the circuit performance and will be the primary factors in the evolution of submicron VLSI technology. Examples of contact resistance shallow junction series resistance and rc time delay of interconnections, respectively are shown. Results of theoretical modeling indicate that below 1 micron minimum feature size the impact of these parsitics will seriously hurt the circuit and system performance. The RC time delay, the IR voltage drop, the power consumption and the crosstalk noise due to these parastics will become appreciable. Thus even with very fast devices, the overall performance of a large circuit could be seriously affected by the limitations of interconnections and contacts. It is evident that refractory metals and silicides are playing increasingly important roles. It must be also be pointed out that these materials will not replace aluminum but compliment it. The materials which have been used or proposed for forming interconnections can be broadly classified into four categories: heavily doped polysilicon, low temperature metals, high temperature refractory metals and metal silicides. Table compares properties of some of these materials showing their compatibility with present silicon fabrication technology.
Fundamentals of Semiconductor Processing Technology
Fundamentals of Semiconductor Processing Technology - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Fundamentals of Semiconductor Processing Technology write by Badih El-Kareh. This book was released on 2012-12-06. Fundamentals of Semiconductor Processing Technology available in PDF, EPUB and Kindle. The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.
