Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications

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Release : 2006
Genre : Dielectric films
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Book Rating : /5 ( reviews)

Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications write by Ramakrishna Vedula. This book was released on 2006. Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications available in PDF, EPUB and Kindle.

Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

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Release : 1999-09-07
Genre : Science
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Book Rating : 531/5 ( reviews)

Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set write by Hari Singh Nalwa. This book was released on 1999-09-07. Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set available in PDF, EPUB and Kindle. Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.

High Dielectric Constant Materials

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Author :
Release : 2005
Genre : Science
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Book Rating : 818/5 ( reviews)

High Dielectric Constant Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook High Dielectric Constant Materials write by Howard Huff. This book was released on 2005. High Dielectric Constant Materials available in PDF, EPUB and Kindle. Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

Interlayer Dielectrics for Semiconductor Technologies

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Release : 2003-10-13
Genre : Science
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Book Rating : 959/5 ( reviews)

Interlayer Dielectrics for Semiconductor Technologies - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Interlayer Dielectrics for Semiconductor Technologies write by Shyam P Muraka. This book was released on 2003-10-13. Interlayer Dielectrics for Semiconductor Technologies available in PDF, EPUB and Kindle. Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.

Low Dielectric Constant Materials and Methods for Interlayer Dielectric Films in Ultralarge-scale Integrated Circuit Multilevel Interconnections

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Release : 1998
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Low Dielectric Constant Materials and Methods for Interlayer Dielectric Films in Ultralarge-scale Integrated Circuit Multilevel Interconnections - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Low Dielectric Constant Materials and Methods for Interlayer Dielectric Films in Ultralarge-scale Integrated Circuit Multilevel Interconnections write by Tetsuya Homma. This book was released on 1998. Low Dielectric Constant Materials and Methods for Interlayer Dielectric Films in Ultralarge-scale Integrated Circuit Multilevel Interconnections available in PDF, EPUB and Kindle.