Low-Dielectric Constant Materials II: Volume 443 - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Low-Dielectric Constant Materials II: Volume 443 write by André Lagendijk. This book was released on 1997-08-19. Low-Dielectric Constant Materials II: Volume 443 available in PDF, EPUB and Kindle. Low-dielectric constant materials are needed to improve the performance and speed of future integrated circuits. In fact, the diversity of contributors to this book is testimony to the global significance of the topic to the future of semiconductor manufacturing. Presentations include those by semiconductor equipment manufacturers and chemical source suppliers, academia from six countries, four government laboratories and five major device manufacturers. Approaches to designing and implementing reduction in dielectric constant for intermetal dielectric materials are featured and range from the evolution of silicon dioxide to fluorinated silicate glass, to the use of inorganic/organic polymers and spin-on-material, to fluorinated diamond-like carbon and nanoporous silica. The book also addresses the practical aspects of the use of low-dielectric constant materials such as chemical mechanical polishing of these materials and optimization of wiring delays in devices utilizing low-k material.
Low-dielectric Constant Materials
Low-dielectric Constant Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Low-dielectric Constant Materials write by . This book was released on 1998. Low-dielectric Constant Materials available in PDF, EPUB and Kindle.
Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set
Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set write by Hari Singh Nalwa. This book was released on 1999-09-07. Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set available in PDF, EPUB and Kindle. Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.
Interlayer Dielectrics for Semiconductor Technologies
Interlayer Dielectrics for Semiconductor Technologies - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Interlayer Dielectrics for Semiconductor Technologies write by Shyam P Muraka. This book was released on 2003-10-13. Interlayer Dielectrics for Semiconductor Technologies available in PDF, EPUB and Kindle. Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I write by Electrochemical Society. Dielectric Science and Technology Division. This book was released on 1999. Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I available in PDF, EPUB and Kindle.
