Modeling and Optimization for Epitaxial Growth: Transport and Growth Studies - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Modeling and Optimization for Epitaxial Growth: Transport and Growth Studies write by . This book was released on 1999. Modeling and Optimization for Epitaxial Growth: Transport and Growth Studies available in PDF, EPUB and Kindle. This report details the objectives, methodologies, and results for Phase II of the project, "Modeling and Optimization for Epitaxial Growth". This project is a joint effort between the Institute for Systems Research (ISR) and Northrop Grumman Corporation's Electronic Sensors and Systems Sector (ESSS), Baltimore, MD. The overall objective is to improve manufacturing effectiveness for epitaxial growth of silicon and silicon-germanium (Si-Ge) thin films on a silicon wafer. Growth takes place in the ASM Epsilon-1 chemical vapor deposition (CVD) reactor, a production tool currently in use at ESSS. Phase II project results include development of a new comprehensive process-equipment model capable of predicting gas flow, heat transfer, species transport, and chemical mechanisms in the reactor under a variety of process conditions and equipment settings. Applications of the model include prediction and control of deposition rate and thickness uniformity; studying sensitivity of deposition rate to process settings such as temperature, pressure, and flow rates; and reducing the use of consumables via purge flow optimization. The implications of various simulation results are discussed in terms of how they can be used to reduce costs and improve product quality, e.g., thickness uniformity of thin films. We demonstrate that achieving deposition uniformity requires some degree of temperature non-uniformity to compensate for the effects of other phenomena such as reactant depletion, gas heating and gas phase reactions, thermal diffusion of species, and flow patterns.
Epitaxy
Epitaxy - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Epitaxy write by Marian A. Herman. This book was released on 2013-03-09. Epitaxy available in PDF, EPUB and Kindle. In a uniform and comprehensive manner the authors describe all the important aspects of the epitaxial growth processes of solid films on crystalline substrates, e.g. processes in which atoms of the growing film mimic the arrangement of the atoms of the substrate. Emphasis is put on sufficiently fundamental and unequivocal presentation of the subject in the form of an easy-to-read review. A large part of this book focuses on the problems of heteroepitaxy. The most important epitaxial growth techniques which are currently widely used in basic research as well as in manufacturing processes of devices are presented and discussed in detail.
Modeling of Epitaxial Growth
Modeling of Epitaxial Growth - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Modeling of Epitaxial Growth write by Percy B. Chinoy. This book was released on 1986. Modeling of Epitaxial Growth available in PDF, EPUB and Kindle.
Epitaxial Growth Part A
Epitaxial Growth Part A - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Epitaxial Growth Part A write by J Matthews. This book was released on 2012-12-02. Epitaxial Growth Part A available in PDF, EPUB and Kindle. Epitaxial Growth, Part A is a compilation of review articles that describe various aspects of the growth of single-crystal films on single-crystal substrates. The collection contains topics on the historical development of epitaxy, the nucleation of thin films, the structure of the interface between film and substrate, and the generation of defects during film growth. The text also provides descriptions of the methods used to prepare and examine thin films and a list of the overgrowth-substrate combinations studied. Mineralogists, materials engineers and scientists, and physicists will find this book a great source of insight.
Epitaxial Growth
Epitaxial Growth - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Epitaxial Growth write by J. W. Matthews. This book was released on 2013-10-22. Epitaxial Growth available in PDF, EPUB and Kindle. Epitaxial Growth Part B is the second part of a collection of review articles that describe various aspects of the growth of single-crystal films on single-crystal substrates. The topics discussed are the nucleation of thin films, the structure of the interface between film and substrate, and the generation of defects during film growth. The methods used to prepare and examine thin films are described and a list of the overgrowth-substrate combinations studied so far is given.
