Plasma Processes for Semiconductor Fabrication - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Plasma Processes for Semiconductor Fabrication write by W. N. G. Hitchon. This book was released on 2005-09-29. Plasma Processes for Semiconductor Fabrication available in PDF, EPUB and Kindle. Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an overview of plasma reactors and discusses the various models for understanding plasma processes. He then covers plasma chemistry, addressing the effects of different chemicals on the features being etched. Having presented the relevant background material, he then describes in detail the modeling of complex plasma systems, with reference to experimental results. The book closes with a useful glossary of technical terms. No prior knowledge of plasma physics is assumed in the book. It contains many homework exercises and serves as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practicing engineers in the semiconductor industry.
Plasma Processes for Semiconductor Fabrication
Plasma Processes for Semiconductor Fabrication - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Plasma Processes for Semiconductor Fabrication write by W. N. G. Hitchon. This book was released on 1999-01-28. Plasma Processes for Semiconductor Fabrication available in PDF, EPUB and Kindle. An up-to-date description of plasma etching and deposition in semiconductor fabrication.
Particle Contamination Control in Plasma Processing
Particle Contamination Control in Plasma Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Particle Contamination Control in Plasma Processing write by . This book was released on 1995. Particle Contamination Control in Plasma Processing available in PDF, EPUB and Kindle. Plasma processing is used for (approximately)35% of the process steps required for semiconductor manufacturing. Recent studies have shown that plasma processes create the greatest amount of contaminant dust of all the manufacturing steps required for device fabrication. Often, the level of dust in a plasma process tool exceeds the cleanroom by several orders of magnitude. Particulate contamination generated in a plasma tool can result in reliability problems as well as device failure. Inter-level wiring shorts different levels of metallization on a device is a common result of plasma particulate contamination. We have conducted a thorough study of the physics and chemistry involved in particulate formation and transport in plasma tools. In-situ laser light scattering (LLS) is used for real-time detection of the contaminant dust. The results of this work are highly surprising: all plasmas create dust; the dust can be formed by homogeneous as well as heterogeneous chemistry; this dust is charged and suspended in the plasma; additionally, it is transported to favored regions of the plasma, such as those regions immediately above wafers. Fortunately, this work has also led to a novel means of controlling and eliminating these unwanted contaminants: electrostatic {open_quotes}drainpipes{close_quotes} engineered into the electrode by means of specially designed grooves. These channel the suspended particles out of the plasma and into the pump port before they can fall onto the wafer.
Plasma Processing of Semiconductors
Plasma Processing of Semiconductors - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Plasma Processing of Semiconductors write by P.F. Williams. This book was released on 2013-11-11. Plasma Processing of Semiconductors available in PDF, EPUB and Kindle. Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Plasma Processing of Materials
Plasma Processing of Materials - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Plasma Processing of Materials write by National Research Council. This book was released on 1991-02-01. Plasma Processing of Materials available in PDF, EPUB and Kindle. Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
