Rapid Thermal Vapor Phase Epitaxy - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Rapid Thermal Vapor Phase Epitaxy write by John D. Leighton. This book was released on 1989. Rapid Thermal Vapor Phase Epitaxy available in PDF, EPUB and Kindle.
Rapid Thermal Vapor Phase Epitaxy
Rapid Thermal Vapor Phase Epitaxy - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Rapid Thermal Vapor Phase Epitaxy write by John D. Leighton. This book was released on 1994. Rapid Thermal Vapor Phase Epitaxy available in PDF, EPUB and Kindle.
Advances in Rapid Thermal Processing
Advances in Rapid Thermal Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Advances in Rapid Thermal Processing write by Fred Roozeboom. This book was released on 1999. Advances in Rapid Thermal Processing available in PDF, EPUB and Kindle.
Advances in Rapid Thermal and Integrated Processing
Advances in Rapid Thermal and Integrated Processing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Advances in Rapid Thermal and Integrated Processing write by F. Roozeboom. This book was released on 2013-03-09. Advances in Rapid Thermal and Integrated Processing available in PDF, EPUB and Kindle. Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Organometallic Vapor-Phase Epitaxy
Organometallic Vapor-Phase Epitaxy - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Organometallic Vapor-Phase Epitaxy write by Gerald B. Stringfellow. This book was released on 2012-12-02. Organometallic Vapor-Phase Epitaxy available in PDF, EPUB and Kindle. Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.
