Refractory Metals and Silicides for Very Large Scale Integration Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Refractory Metals and Silicides for Very Large Scale Integration Applications write by Krishna C. Saraswat. This book was released on 1985. Refractory Metals and Silicides for Very Large Scale Integration Applications available in PDF, EPUB and Kindle. Continuous advancements in technology have resulted in integrated circuits with smaller device dimensions, and larger area and complexity. The overall circuit performance has depended primarily on the device properties. However, the parasitic resistance and capacitance associated with interconnections and contacts, as for an MOS transistor, are now beginning to influence the circuit performance and will be the primary factors in the evolution of submicron VLSI technology. Examples of contact resistance shallow junction series resistance and rc time delay of interconnections, respectively are shown. Results of theoretical modeling indicate that below 1 micron minimum feature size the impact of these parsitics will seriously hurt the circuit and system performance. The RC time delay, the IR voltage drop, the power consumption and the crosstalk noise due to these parastics will become appreciable. Thus even with very fast devices, the overall performance of a large circuit could be seriously affected by the limitations of interconnections and contacts. It is evident that refractory metals and silicides are playing increasingly important roles. It must be also be pointed out that these materials will not replace aluminum but compliment it. The materials which have been used or proposed for forming interconnections can be broadly classified into four categories: heavily doped polysilicon, low temperature metals, high temperature refractory metals and metal silicides. Table compares properties of some of these materials showing their compatibility with present silicon fabrication technology.
Silicides for VLSI Applications
Silicides for VLSI Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Silicides for VLSI Applications write by Shyam P. Murarka. This book was released on 2012-12-02. Silicides for VLSI Applications available in PDF, EPUB and Kindle. Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Very-Large-Scale Integration
Very-Large-Scale Integration - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Very-Large-Scale Integration write by Kim Ho Yeap. This book was released on 2018-02-28. Very-Large-Scale Integration available in PDF, EPUB and Kindle. In this book, a variety of topics related to Very-Large-Scale Integration (VLSI) is extensively discussed. The topics encompass the physics of VLSI transistors, the process of integrated chip design and fabrication and the applications of VLSI devices. It is intended to provide information on the latest advancement of VLSI technology to researchers, physicists as well as engineers working in the field of semiconductor manufacturing and VLSI design.
A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications
A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications write by Phu Hiep Luong. This book was released on 1984. A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications available in PDF, EPUB and Kindle.
Incorporation of Metal Silicides and Refractory Metals in VLSI Technology
Incorporation of Metal Silicides and Refractory Metals in VLSI Technology - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Incorporation of Metal Silicides and Refractory Metals in VLSI Technology write by C. M. Osburn. This book was released on 1991. Incorporation of Metal Silicides and Refractory Metals in VLSI Technology available in PDF, EPUB and Kindle.
