Soft X-Ray Microscopy and Metrology - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Soft X-Ray Microscopy and Metrology write by . This book was released on 2001. Soft X-Ray Microscopy and Metrology available in PDF, EPUB and Kindle. This AFOSR grant has been used to support graduate students in the areas of coherence and microscopy at soft x-ray wavelengths. Techniques were developed for characterizing the spatial coherence of undulator radiation, table top soft x-ray lasers, and high harmonic generation of femtosecond pulses at short wavelengths, all in the 1-50 nm wavelength regime. With varying additional attributes, all three sources provide radiation exhibiting a high degree of spatial coherence. In the area of high resolution soft x-ray microscopy, a spatial resolution of 23 nanometers has been demonstrated using new, best-in-the-world, Fresnel zone plate lenses, special nanometer test patterns, and bending magnet radiation in the 1-4 nm region. State-of-the-art images have been obtained of magnetic recording materials with sub-5O nm domains, cryo-prepared biological samples showing detailed views of cells and sub-cellular structures, and modern nanochip interconnects. A new text has been published: D. Attwood, "Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications" (Cambridge Univ. Press, UK 2000). Several reprints are attached: "Soft X-ray Microscopy to 25 nm with Applications to Biology and Magnetic Materials" (NIM A, v467-468, p841-844, 2001); "Spatial Coherence and Properties of Undulator Radiation Based on Thompson-Wolf Two-pinhole Measurement" (NIM A, v467-468, p913-916, 2001); "Spatial Coherence Characterization of Undulator Radiation" (Optics Communications, v182, p25-34, 2000); "Achievement of Essentially Full Spatial Coherence in a High-Average-Power Soft X-ray Laser" (Phys. Rev. A, v63 n3, p33802-1 to 33802-5, 2001); "Nanofabrication and Diffractive Optics for High-Resolution X-ray Applications" (J. Vac. Sci. Technol. B, v18 n6, p2970-2975, Nov-Dec 2000); "High-Resolution Soft X-ray Microscopy" (Proc. of SPIE Reprint, v4146, p171-175, 2000); "Experimental Analysis of High-Resolution Soft X-ray Microscopy" (Proc. of SPIE Reprint, v4499, p134-141, 2001).7.
X-Ray Metrology in Semiconductor Manufacturing
X-Ray Metrology in Semiconductor Manufacturing - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook X-Ray Metrology in Semiconductor Manufacturing write by D. Keith Bowen. This book was released on 2018-10-03. X-Ray Metrology in Semiconductor Manufacturing available in PDF, EPUB and Kindle. The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
X-ray Microscope Assemblies. Final Report and Metrology Report
X-ray Microscope Assemblies. Final Report and Metrology Report - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook X-ray Microscope Assemblies. Final Report and Metrology Report write by . This book was released on 1981. X-ray Microscope Assemblies. Final Report and Metrology Report available in PDF, EPUB and Kindle. This is the Final Report and Metrology Report prepared under Lawrence Livermore Laboratory Subcontract 9936205, X-ray Microscope Assemblies. The purpose of this program was to design, fabricate, and perform detailed metrology on an axisymmetric grazing-incidence x-ray microscope (XRMS) to be used as a diagnostic instrument in the Lawrence Livermore Laser Fusion Program. The optical configuration chosen for this device consists of two internally polished surfaces of revolution: an hyperboloid facing the object; and a confocal, co-axial elliposid facing the image. This arrangement is known as the Wolter Type-I configuration. The grazing angle of reflection for both surfaces is approximately 1°. The general optical performance goals under this program were to achieve a spatial resolution in the object plane in the soft x-ray region of approximately 1 micron, and to achieve an effective solid collecting angle which is an appreciable fraction of the geometric solid collecting angle.
Optical Systems for Soft X Rays
Optical Systems for Soft X Rays - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Optical Systems for Soft X Rays write by A.G. Michette. This book was released on 2012-12-06. Optical Systems for Soft X Rays available in PDF, EPUB and Kindle. A fundamental problem in cell biology is the cause of aging. The solution to this problem has not yet been obtained because,(l) until recently, it was not possible to image living cells directly. The use of low-energy (soft) X rays has made such imaging possible, perhaps thereby allowing the aging process to be understood and possibly overcome (a result that may well generate further social, moral, and ethical problems). Fortun ately this is not the only aspect of cell biology amenable to soft X-ray imaging, and it is envisaged that many less controversial studies--such as investigations of the detailed differences between healthy and diseased or malignant cells (in their natural states) and processes of cell division and growth-will be made possible. The use of soft X rays is not limited to biological studies-many applications are possible in, for example, fusion research, materials science, and astronomy. Such studies have only recently begun in earnest because several difficulties had to be overcome, major among these being the lack (for some purposes) of sufficiently intense sources, and the technological difficulties associated with making efficient optical systems. As is well known, the advent of dedicated synchrotron radiation sources, in particular, has alleviated the first of these difficulties, not just for the soft X-ray region. It is the purpose of this book to consider progress in the second.
Optical Systems for Soft X Rays
Optical Systems for Soft X Rays - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Optical Systems for Soft X Rays write by A.G. Michette. This book was released on 1884. Optical Systems for Soft X Rays available in PDF, EPUB and Kindle. A fundamental problem in cell biology is the cause of aging. The solution to this problem has not yet been obtained because,(l) until recently, it was not possible to image living cells directly. The use of low-energy (soft) X rays has made such imaging possible, perhaps thereby allowing the aging process to be understood and possibly overcome (a result that may well generate further social, moral, and ethical problems). Fortun ately this is not the only aspect of cell biology amenable to soft X-ray imaging, and it is envisaged that many less controversial studies--such as investigations of the detailed differences between healthy and diseased or malignant cells (in their natural states) and processes of cell division and growth-will be made possible. The use of soft X rays is not limited to biological studies-many applications are possible in, for example, fusion research, materials science, and astronomy. Such studies have only recently begun in earnest because several difficulties had to be overcome, major among these being the lack (for some purposes) of sufficiently intense sources, and the technological difficulties associated with making efficient optical systems. As is well known, the advent of dedicated synchrotron radiation sources, in particular, has alleviated the first of these difficulties, not just for the soft X-ray region. It is the purpose of this book to consider progress in the second.
