Ultraclean Surface Processing of Silicon Wafers - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Ultraclean Surface Processing of Silicon Wafers write by Takeshi Hattori. This book was released on 2013-03-09. Ultraclean Surface Processing of Silicon Wafers available in PDF, EPUB and Kindle. A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
Crystalline Defects and Contamination
Crystalline Defects and Contamination - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Crystalline Defects and Contamination write by Bernd O. Kolbesen. This book was released on 2001. Crystalline Defects and Contamination available in PDF, EPUB and Kindle.
Handbook of Semiconductor Manufacturing Technology
Handbook of Semiconductor Manufacturing Technology - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Handbook of Semiconductor Manufacturing Technology write by Yoshio Nishi. This book was released on 2017-12-19. Handbook of Semiconductor Manufacturing Technology available in PDF, EPUB and Kindle. Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Ultra Clean Processing of Semiconductor Surfaces XVI
Ultra Clean Processing of Semiconductor Surfaces XVI - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Ultra Clean Processing of Semiconductor Surfaces XVI write by Paul Mertens. This book was released on 2023-08-14. Ultra Clean Processing of Semiconductor Surfaces XVI available in PDF, EPUB and Kindle. Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023) Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 12-14, 2023, Brugge, Belgium
Developments in Surface Contamination and Cleaning
Developments in Surface Contamination and Cleaning - read free eBook in online reader or directly download on the web page. Select files or add your book in reader. Download and read online ebook Developments in Surface Contamination and Cleaning write by Rajiv Kohli. This book was released on 2008-01-10. Developments in Surface Contamination and Cleaning available in PDF, EPUB and Kindle. Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are ôkiller defectsö today, with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced and profusely illustrated.• Excellent reference for a host of technologies and industries ranging from microelectronics to optics to automotive to biomedical.• A single source document addressing everything from the sources of contamination to their removal and prevention.• Amply referenced and profusely illustrated.
